Device Materials Group, 
Materials Sci.

Giant Magnetoresistive Materials (GMR)

GMR deposition system

As part of our GMR device development programme we are currently constructing a dedicated magnetic device materials deposition system. This machine is designed to coat moderately large areas with uniform thicknesses of magnetic multilayers suitable for GMR or spin-valve device fabrication and development. This system is currently taking shape, and its progress will be displayed here.

Removing the previous occupant of the space for the new system  
Basic chamber in position  
The addition of the loadlock chamber  
Connection of the gas reservior  
Installation of the rotary pump (for backing the turbo pumps and rough pumping the load-lock) and associated tubing.  
Blanking-off of the chamber ports for basic vacuum testing  
All ports blanked and pumps wired up to electronics rack  
System completed for vacuum testing 
Pressure (mBar) one hour after switching turbo pumps on.
Copper cooling shield assembly  
 Copper cooling shield with first flange fitted  
Final assembly completed and two magnetrons fitted.  


dmg homedept homeucam home


Pages constructed by:
Mark Blamire
Dept. Materials Science and Metallurgy, University of Cambridge,
Pembroke Street, Cambridge CB2 3QZ, UK