The Department has extensive thin film deposition facilities. The clickable map below shows the equipment sited in the main thin film deposition laboratory on the ground floor of the Materials Department annexe. This facility permits ultra-high vacuum deposition of a variety of thin films and heterostructures for a number of projects.
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Equipment2-7 Sputter deposition systems 8 RF CVD system 9,10 Laser ablation system E electronics racks L excimer laser S Plasma optical emission spectrometer |
