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Electromigration

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SEM micrograph showing voids and hillocks

At the high current densities typical in thin-film conductors on integrated circuits, there is significant momentum transfer from the electrons to the atoms. The microstructure of the metallization leads to the consequent atomic flow being non-uniform, and damage results in the form of voids or hillocks. Our work focuses on the interactions of microstructure, electromigration damage and failure.

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TEM micrographs of in-situ test showing voiding


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